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Lithography : principles, processes and materials /

Lithography : principles, processes and materials / Theodore C. Hennessy, editor - Hauppauge, NY : Nova Science Pub., 2011 - xii, 284 p. : ill. (some col.) ; 26 cm. - Engineering tools, techniques and tables Nanotechnology science and technology . - Engineering tools, techniques and tables .

Includes bibliographical references and index

ISBN: 9781617618376

Subjects--Topical Terms:
Microlithography
Microfabrication

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