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Lithography : principles, processes and materials / Theodore C. Hennessy, editor
Material type:
TextSeries: Nanotechnology science and technology | Engineering tools, techniques and tablesPublication details: Hauppauge, NY : Nova Science Pub., 2011Description: xii, 284 p. : ill. (some col.) ; 26 cmISBN: - 9781617618376
| Item type | Current library | Call number | Copy number | Status | Date due | Barcode | |
|---|---|---|---|---|---|---|---|
Open Shelf
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UMPLIB PEKAN | TK7872.M3 L584 2011 (Browse shelf(Opens below)) | 1 | Available | 0000087663 |
Includes bibliographical references and index