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Instrumentation, metrology, and standards for nanomanufacturing, optics, and semiconductors VII : 28 August, San Diego, California, United States /

Instrumentation, metrology, and standards for nanomanufacturing, optics, and semiconductors VII : 28 August, San Diego, California, United States / Michael T. Postek, Ndubuisi G. Orji, editors - Bellingham, Washington : SPIE, 2013 - 1 v. (various pagings) : ill. ; 28 cm. - Proceedings of SPIE, v. 8819 0277-786X ; . - Proceedings of SPIE, v. 8819 .

Includes bibliographical references and index

ISBN: 9780819496690 0819496693

Subjects--Topical Terms:
Nanostructured materials--Congresses
Microfabrication--Congresses
Nanotechnology--Congresses

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