Instrumentation, metrology, and standards for nanomanufacturing, optics, and semiconductors VII : 28 August, San Diego, California, United States / Michael T. Postek, Ndubuisi G. Orji, editors

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Material type: Text

TextSeries: Proceedings of SPIE ; v. 8819 | Proceedings of SPIE ; v. 8819Publication details: Bellingham, Washington : SPIE, 2013Description: 1 v. (various pagings) : ill. ; 28 cmISBN:

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Holdings
Item type	Current library	Call number	Copy number	Status	Date due	Barcode
Open Shelf	UMPLIB PEKAN	T174.7 .I57 2013 (Browse shelf(Opens below))	1	Available		0000100382

Includes bibliographical references and index