Physics of radio-frequency plasmas / Pascal Chabert, CNRS, Nicholas Braithwaite, The Open University

By:

Chabert, Pascal, 1969-

Contributor(s):

Braithwaite, Nicholas (Nicholas St. J.)

Material type: Text

TextPublication details: Cambridge, UK : Cambridge University Press, 2011Description: viii, 385 pages : ill. ; 26 cmISBN:

9780521763004
0521763002

Subject(s):

Online resources:

Contents:

Machine generated contents note: 1. Introduction; 2. Plasma dynamics and equilibrium; 3. Bounded plasmas; 4. Radiofrequency sheaths; 5. Single frequency capacitively-coupled plasmas; 6. Multi-frequency capacitively-coupled plasmas; 7. Inductively-coupled plasmas; 8. Helicon plasmas; 9. Real plasmas; 10. Electrical measurements; Index

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Holdings ( 1 )
Title notes ( 2 )

Holdings
Item type	Current library	Call number	Copy number	Status	Date due	Barcode
Open Shelf	UMPLIB PEKAN	TA2020 .C43 2011 (Browse shelf(Opens below))	1	Available		0000070270

Includes bibliographical references and index