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		Handbook of semiconductor manufacturing technology / edited by Yoshio Nishi, Robert Doering; assistant editor Tim Wooldridge by Nishi, Yoshio Doering, Robert Wooldridge, Tim Material type: Text; Format: print ; Literary form: Not fiction ; Audience: Specialized; Publication details: New York : Marcel Dekker, 2000 Availability: Items available for reference: UMPLIB PEKAN: Not for loan (1)Call number: TK7871.85 .H36 2000 r. Log in to add tags Add to cart (remove)
		No cover image available Handbook of semiconductor manufacturing technology / edited by Robert Doering, Yoshio Nishi. by Doering, Robert, 1946- Nishi, Yoshio, 1940- Edition: 2nd ed. Material type: Text; Format: print ; Literary form: Not fiction Publication details: Boca Raton : CRC Press, c2008 Online resources: Table of contents only Availability: Items available for reference: UMPLIB PEKAN: Not for loan (1)Call number: TK7871.85 .H36 2008 r. Log in to add tags Add to cart (remove)

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