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Handbook of semiconductor manufacturing technology / edited by Robert Doering, Yoshio Nishi.

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Material type: Text

TextPublication details: Boca Raton : CRC Press, c2008.Edition: 2nd edDescription: 1 v. (various pagings) : ill. ; 27 cmISBN:

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Holdings
Item type	Current library	Call number	Copy number	Status	Date due	Barcode
Reference	UMPLIB PEKAN	TK7871.85 .H36 2008 r (Browse shelf(Opens below))	1	Not for loan		0000035685

Includes bibliographical references and index.