MARC details
| 000 -LEADER |
| fixed length control field |
01142nam a2200265 a 4500 |
| 001 - CONTROL NUMBER |
| control field |
vtls000029855 |
| 003 - CONTROL NUMBER IDENTIFIER |
| control field |
KUKTEM |
| 005 - DATE AND TIME OF LATEST TRANSACTION |
| control field |
20251117141236.0 |
| 008 - FIXED-LENGTH DATA ELEMENTS--GENERAL INFORMATION |
| fixed length control field |
080701s2008 flua bf 001 0 eng |
| 020 ## - INTERNATIONAL STANDARD BOOK NUMBER |
| International Standard Book Number |
574446754 (alk. paper) |
| 020 ## - INTERNATIONAL STANDARD BOOK NUMBER |
| International Standard Book Number |
9781574446753 (alk. paper) |
| 039 #9 - LEVEL OF BIBLIOGRAPHIC CONTROL AND CODING DETAIL [OBSOLETE] |
| Level of rules in bibliographic description |
201107132027 |
| Level of effort used to assign nonsubject heading access points |
VLOAD |
| Level of effort used to assign subject headings |
200908141454 |
| Level of effort used to assign classification |
VLOAD |
| Level of effort used to assign subject headings |
200908141425 |
| Level of effort used to assign classification |
VLOAD |
| Level of effort used to assign subject headings |
200908131802 |
| Level of effort used to assign classification |
VLOAD |
| -- |
200807010913 |
| -- |
norsaini |
| 040 ## - CATALOGING SOURCE |
| Original cataloging agency |
UMP |
| 245 00 - TITLE STATEMENT |
| Title |
Handbook of semiconductor manufacturing technology / |
| Statement of responsibility, etc. |
edited by Robert Doering, Yoshio Nishi. |
| 250 ## - EDITION STATEMENT |
| Edition statement |
2nd ed. |
| 260 ## - PUBLICATION, DISTRIBUTION, ETC. |
| Place of publication, distribution, etc. |
Boca Raton : |
| Name of publisher, distributor, etc. |
CRC Press, |
| Date of publication, distribution, etc. |
c2008. |
| 300 ## - PHYSICAL DESCRIPTION |
| Extent |
1 v. (various pagings) : |
| Other physical details |
ill. ; |
| Dimensions |
27 cm. |
| 500 ## - GENERAL NOTE |
| General note |
Includes bibliographical references and index. |
| 650 #0 - SUBJECT ADDED ENTRY--TOPICAL TERM |
| Topical term or geographic name entry element |
Semiconductors |
| General subdivision |
Design and construction |
| Form subdivision |
Handbooks, manuals, etc |
| 650 #0 - SUBJECT ADDED ENTRY--TOPICAL TERM |
| Topical term or geographic name entry element |
Semiconductor industry |
| Form subdivision |
Handbooks, manuals, etc. |
| 700 1# - ADDED ENTRY--PERSONAL NAME |
| Personal name |
Doering, Robert, |
| Dates associated with a name |
1946- |
| 700 1# - ADDED ENTRY--PERSONAL NAME |
| Personal name |
Nishi, Yoshio, |
| Dates associated with a name |
1940- |
| 856 41 - ELECTRONIC LOCATION AND ACCESS |
| Materials specified |
Table of contents only |
| Uniform Resource Identifier |
<a href="http://www.loc.gov/catdir/toc/ecip077/2006102599.html">http://www.loc.gov/catdir/toc/ecip077/2006102599.html</a> |