Handbook of semiconductor manufacturing technology /
Handbook of semiconductor manufacturing technology /
edited by Robert Doering, Yoshio Nishi.
- 2nd ed.
- Boca Raton : CRC Press, c2008.
- 1 v. (various pagings) : ill. ; 27 cm.
Includes bibliographical references and index.
574446754 (alk. paper) 9781574446753 (alk. paper)
Semiconductors--Design and construction--Handbooks, manuals, etc
Semiconductor industry--Handbooks, manuals, etc.
Includes bibliographical references and index.
574446754 (alk. paper) 9781574446753 (alk. paper)
Semiconductors--Design and construction--Handbooks, manuals, etc
Semiconductor industry--Handbooks, manuals, etc.