Micro process engineering : fundamentals, devices, fabrication, and applications / volume editor : Norbert Kockmann

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Material type: Text

TextSeries: Advanced micro & nanosystems ; 5Publication details: Weinheim : Wiley-VCH , c2006Description: xxii, 507 p. : ill. ; 24 cmISBN:

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Holdings
Item type	Current library	Call number	Copy number	Status	Date due	Barcode
Open Shelf	UMPLIB PEKAN	TS183 .M53 2006 (Browse shelf(Opens below))	1	Available		0000021497

Includes bibliographical references and index