Normal view MARC view ISBD view

Feasible laser parameters in fabrication of MEMS structures on silicon / Yong Chee Ping

By:

Yong, Chee Ping

Material type: Text

TextPublication details: Kuantan, Pahang : UMP, 2010Description: xvi, 42 p. : ill. (some col.) ; 30 cm. + 1 computer discsISBN:

THE0006607(Local)

Other title:

Feasible laser parameters in fabrication of MEMS structures on silicon [computer file]

Subject(s):

Dissertation note: Project paper (Bachelor of Mechanical Engineering) -- Universiti Malaysia Pahang - 2010 Abstract: The technique of making MEMS structures are kept improving which from old fashion with high cost machine to very advanced one to save time and labor cost. In this report, laser machining of silicon using ND:YAG is introduced. The main objectives are generating MEMS structures on silicon wafer by using laser micromachining and the effects of parameters of laser micromachining on silicon.STATISTICA is used to design and analyze the experiments. Two experimental sets: (1) laser processing with assist gas and (2)laser processing without assist gas were carried out. Basic feature of MEMS and micro spots were generated. The micro features were investigated under SEM. Experimental results were analyzed in STATISTICA. Analyzed results show that laser power is the most significant effect followed by pulse width and the assist gas on the micro feature size and particularly feature quality. It was found that laser processing without assist gas produce promising results.

Tags from this library: No tags from this library for this title. Log in to add tags.

Average rating: 0.0 (0 votes)

Holdings ( 2 )
Title notes ( 3 )

Holdings
Item type	Current library	Call number	Copy number	Status	Date due	Barcode
Final Year Report	UMPLIB PEKAN	TJ1191.5 .Y66 2010 rs Bc. (Browse shelf(Opens below))	1	Not for loan		0000054037
Final Year Report	UMPLIB PEKAN	CD 5034 \| TJ1191.5 .Y66 2010 rs Bc. (Browse shelf(Opens below))	1	Not for loan		0000054038

Project paper (Bachelor of Mechanical Engineering) -- Universiti Malaysia Pahang - 2010

Bibliography : p. 40

The technique of making MEMS structures are kept improving which from old fashion with high cost machine to very advanced one to save time and labor cost. In this report, laser machining of silicon using ND:YAG is introduced. The main objectives are generating MEMS structures on silicon wafer by using laser micromachining and the effects of parameters of laser micromachining on silicon.STATISTICA is used to design and analyze the experiments. Two experimental sets: (1) laser processing with assist gas and (2)laser processing without assist gas were carried out. Basic feature of MEMS and micro spots were generated. The micro features were investigated under SEM. Experimental results were analyzed in STATISTICA. Analyzed results show that laser power is the most significant effect followed by pulse width and the assist gas on the micro feature size and particularly feature quality. It was found that laser processing without assist gas produce promising results.