MEMS cost analysis : from laboratory to industry / Ron Lawes

By:

Lawes, Ronald A

Material type: Text

TextPublication details: Singapore : Pan Stanford, 2014Description: xvi, 289 p. : ill. ; 24 cmISBN:

9789814411066 (hbk.)

Other title:

Microelectromechanical systems cost analysis

Subject(s):

Contents:

1. The world of MEMS -- 2. Basic fabrication processes -- 3. Surface micromachining -- 4. High-aspect-ratio micromachining -- 5. MEMS testing -- 6. MEMS packaging -- 7. Clean rooms, buildings and plant -- 8. The MEMSCOST spreadsheet -- 9. Product costs : accelerometers -- 10. Product costs : microphones -- 11. MEMS foundries -- 12. Financial reporting and analysis -- 13. Conclusions

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Holdings ( 1 )
Title notes ( 2 )

Holdings
Item type	Current library	Call number	Copy number	Status	Date due	Barcode
Open Shelf	UMPLIB PEKAN	TK7875 .L39 2014 (Browse shelf(Opens below))	1	Available		0000106961

Includes bibliographical references and index