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Handbook of VLSI microlithography : principles, technology, and applications /

Handbook of VLSI microlithography : principles, technology, and applications / edited by John Helbert. - Mumbai ; Delhi : Jaico Publishing House, 2005 - xix, 1001 p. : ill. ; 25 cm.

Includes bibliographical references and index

ISBN: 8179924750

Subjects--Topical Terms:
Integrated circuits--Very large scale integration
Microlithography

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