Handbook of VLSI microlithography : principles, technology, and applications / edited by John Helbert.

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Material type: Text

TextPublication details: Mumbai ; Delhi : Jaico Publishing House, 2005Description: xix, 1001 p. : ill. ; 25 cmISBN:

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Holdings
Item type	Current library	Call number	Copy number	Status	Date due	Barcode
Reference	UMPLIB PEKAN	TK7874 .H36 2005 r (Browse shelf(Opens below))	1	Not for loan		0000020175

Includes bibliographical references and index