Handbook of VLSI microlithography : (Record no. 13083)
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| 000 -LEADER | |
|---|---|
| fixed length control field | 00864nam a2200217 a 4500 |
| 001 - CONTROL NUMBER | |
| control field | vtls000017470 |
| 003 - CONTROL NUMBER IDENTIFIER | |
| control field | KUKTEM |
| 005 - DATE AND TIME OF LATEST TRANSACTION | |
| control field | 20251117141220.0 |
| 008 - FIXED-LENGTH DATA ELEMENTS--GENERAL INFORMATION | |
| fixed length control field | 070117 000 0 eng d |
| 020 ## - INTERNATIONAL STANDARD BOOK NUMBER | |
| International Standard Book Number | 8179924750 |
| 039 #9 - LEVEL OF BIBLIOGRAPHIC CONTROL AND CODING DETAIL [OBSOLETE] | |
| Level of rules in bibliographic description | 201107131856 |
| Level of effort used to assign nonsubject heading access points | VLOAD |
| Level of effort used to assign subject headings | 200908141253 |
| Level of effort used to assign classification | VLOAD |
| Level of effort used to assign subject headings | 200908141225 |
| Level of effort used to assign classification | VLOAD |
| Level of effort used to assign subject headings | 200908131647 |
| Level of effort used to assign classification | VLOAD |
| -- | 200701171002 |
| -- | farina |
| 040 ## - CATALOGING SOURCE | |
| Original cataloging agency | UMP |
| 245 1# - TITLE STATEMENT | |
| Title | Handbook of VLSI microlithography : |
| Remainder of title | principles, technology, and applications / |
| Statement of responsibility, etc. | edited by John Helbert. |
| 260 ## - PUBLICATION, DISTRIBUTION, ETC. | |
| Place of publication, distribution, etc. | Mumbai ; |
| -- | Delhi : |
| Name of publisher, distributor, etc. | Jaico Publishing House, |
| Date of publication, distribution, etc. | 2005 |
| 300 ## - PHYSICAL DESCRIPTION | |
| Extent | xix, 1001 p. : |
| Other physical details | ill. ; |
| Dimensions | 25 cm. |
| 504 ## - BIBLIOGRAPHY, ETC. NOTE | |
| Bibliography, etc. note | Includes bibliographical references and index |
| 650 #0 - SUBJECT ADDED ENTRY--TOPICAL TERM | |
| Topical term or geographic name entry element | Integrated circuits |
| General subdivision | Very large scale integration |
| 650 #0 - SUBJECT ADDED ENTRY--TOPICAL TERM | |
| Topical term or geographic name entry element | Microlithography |
| 700 1# - ADDED ENTRY--PERSONAL NAME | |
| Personal name | Helbert, John N. |
| Withdrawn status | Lost status | Damaged status | Not for loan | Home library | Current library | Date acquired | Total checkouts | Full call number | Barcode | Date last seen | Copy number | Price effective from | Koha item type |
|---|---|---|---|---|---|---|---|---|---|---|---|---|---|
| Not lost | Not for loan | UMPLIB PEKAN | UMPLIB PEKAN | 04/09/2019 | TK7874 .H36 2005 r | 0000020175 | 04/09/2019 | 1 | 04/09/2019 | Reference |