Fundamentals of semiconductor manufacturing and process control /
May, Gary S.
Fundamentals of semiconductor manufacturing and process control / Gary S. May, Costas J. Spanos. - Hoboken, N.J. : Wiley-Interscience, 2006. - 463 p. : ill. ; 25 cm.
0471784060
Semiconductors--Design and construction
Integrated circuits--Design and construction
Process control--Statistical methods
Fundamentals of semiconductor manufacturing and process control / Gary S. May, Costas J. Spanos. - Hoboken, N.J. : Wiley-Interscience, 2006. - 463 p. : ill. ; 25 cm.
0471784060
Semiconductors--Design and construction
Integrated circuits--Design and construction
Process control--Statistical methods