MARC details
| 000 -LEADER |
| fixed length control field |
00928nam a2200241 a 4500 |
| 001 - CONTROL NUMBER |
| control field |
vtls000016792 |
| 003 - CONTROL NUMBER IDENTIFIER |
| control field |
KUKTEM |
| 005 - DATE AND TIME OF LATEST TRANSACTION |
| control field |
20251117144228.0 |
| 008 - FIXED-LENGTH DATA ELEMENTS--GENERAL INFORMATION |
| fixed length control field |
061205t nju e 001 0 eng d |
| 020 ## - INTERNATIONAL STANDARD BOOK NUMBER |
| International Standard Book Number |
0471784060 |
| 039 #9 - LEVEL OF BIBLIOGRAPHIC CONTROL AND CODING DETAIL [OBSOLETE] |
| Level of rules in bibliographic description |
201107131850 |
| Level of effort used to assign nonsubject heading access points |
VLOAD |
| Level of effort used to assign subject headings |
200908141246 |
| Level of effort used to assign classification |
VLOAD |
| Level of effort used to assign subject headings |
200908141218 |
| Level of effort used to assign classification |
VLOAD |
| Level of effort used to assign subject headings |
200908131643 |
| Level of effort used to assign classification |
VLOAD |
| -- |
200612051605 |
| -- |
dilla |
| 040 ## - CATALOGING SOURCE |
| Original cataloging agency |
UMP |
| 090 ## - LOCALLY ASSIGNED LC-TYPE CALL NUMBER (OCLC); LOCAL CALL NUMBER (RLIN) |
| Classification number (OCLC) (R) ; Classification number, CALL (RLIN) (NR) |
TK 7871.85 .M39 2006 |
| 100 1# - MAIN ENTRY--PERSONAL NAME |
| Personal name |
May, Gary S. |
| 245 1# - TITLE STATEMENT |
| Title |
Fundamentals of semiconductor manufacturing and process control / |
| Statement of responsibility, etc. |
Gary S. May, Costas J. Spanos. |
| 260 ## - PUBLICATION, DISTRIBUTION, ETC. |
| Place of publication, distribution, etc. |
Hoboken, N.J. : |
| Name of publisher, distributor, etc. |
Wiley-Interscience, |
| Date of publication, distribution, etc. |
2006. |
| 300 ## - PHYSICAL DESCRIPTION |
| Extent |
463 p. : |
| Other physical details |
ill. ; |
| Dimensions |
25 cm. |
| 650 #0 - SUBJECT ADDED ENTRY--TOPICAL TERM |
| Topical term or geographic name entry element |
Semiconductors |
| General subdivision |
Design and construction |
| 650 #0 - SUBJECT ADDED ENTRY--TOPICAL TERM |
| Topical term or geographic name entry element |
Integrated circuits |
| General subdivision |
Design and construction |
| 650 #0 - SUBJECT ADDED ENTRY--TOPICAL TERM |
| Topical term or geographic name entry element |
Process control |
| General subdivision |
Statistical methods |
| 700 1# - ADDED ENTRY--PERSONAL NAME |
| Personal name |
Spanos, Costas J. |