Fundamentals of semiconductor manufacturing and process control / Gary S. May, Costas J. Spanos.

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Material type: Text

TextPublication details: Hoboken, N.J. : Wiley-Interscience, 2006.Description: 463 p. : ill. ; 25 cmISBN:

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Holdings
Item type	Current library	Call number	Copy number	Status	Date due	Barcode
Open Shelf	UMPLIB PEKAN	TK 7871.85 .M39 2006 (Browse shelf(Opens below))	1	Available		0000019627