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Fundamentals of microfabrication : the science of miniaturization /

Madou, Marc J.

Fundamentals of microfabrication : the science of miniaturization / Marc J. Madou - 2nd ed. - Boca Raton : CRC Press, c2002 - 723 p. : ill. ; 29 cm.

Includes bibliographical references and index

ISBN: 0849308267

Subjects--Topical Terms:
Microelectronics
Integrated circuits--Design and construction
Microelectromechanical systems--Design and construction
Machining
Microelectronic packaging
Lasers

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