Fundamentals of microfabrication : the science of miniaturization / Marc J. Madou

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Material type: Text

TextPublication details: Boca Raton : CRC Press, c2002Edition: 2nd edDescription: 723 p. : ill. ; 29 cmISBN:

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Holdings
Item type	Current library	Call number	Copy number	Status	Date due	Barcode
Open Shelf	UMPLIB PEKAN	TK7836 .M33 2002 (Browse shelf(Opens below))	1	Available		0000022940

Includes bibliographical references and index