MARC details
| 000 -LEADER |
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| fixed length control field |
01061nam a2200289 a 4500 |
| 001 - CONTROL NUMBER |
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| control field |
vtls000019588 |
| 003 - CONTROL NUMBER IDENTIFIER |
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| control field |
KUKTEM |
| 005 - DATE AND TIME OF LATEST TRANSACTION |
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| control field |
20251117144318.0 |
| 008 - FIXED-LENGTH DATA ELEMENTS--GENERAL INFORMATION |
|---|
| fixed length control field |
070423t2002 flua f 001 0 eng d |
| 020 ## - INTERNATIONAL STANDARD BOOK NUMBER |
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| International Standard Book Number |
0849308267 |
| 039 #9 - LEVEL OF BIBLIOGRAPHIC CONTROL AND CODING DETAIL [OBSOLETE] |
|---|
| Level of rules in bibliographic description |
201207030932 |
| Level of effort used to assign nonsubject heading access points |
Fida |
| Level of effort used to assign subject headings |
201107131913 |
| Level of effort used to assign classification |
VLOAD |
| Level of effort used to assign subject headings |
200908141318 |
| Level of effort used to assign classification |
VLOAD |
| Level of effort used to assign subject headings |
200908141250 |
| Level of effort used to assign classification |
VLOAD |
| -- |
200704231517 |
| -- |
sri |
| 040 ## - CATALOGING SOURCE |
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| Original cataloging agency |
UMP |
| 090 ## - LOCALLY ASSIGNED LC-TYPE CALL NUMBER (OCLC); LOCAL CALL NUMBER (RLIN) |
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| Classification number (OCLC) (R) ; Classification number, CALL (RLIN) (NR) |
TK7836 .M33 2002 |
| 100 1# - MAIN ENTRY--PERSONAL NAME |
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| Personal name |
Madou, Marc J. |
| 245 10 - TITLE STATEMENT |
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| Title |
Fundamentals of microfabrication : |
| Remainder of title |
the science of miniaturization / |
| Statement of responsibility, etc. |
Marc J. Madou |
| 250 ## - EDITION STATEMENT |
|---|
| Edition statement |
2nd ed. |
| 260 ## - PUBLICATION, DISTRIBUTION, ETC. |
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| Place of publication, distribution, etc. |
Boca Raton : |
| Name of publisher, distributor, etc. |
CRC Press, |
| Date of publication, distribution, etc. |
c2002 |
| 300 ## - PHYSICAL DESCRIPTION |
|---|
| Extent |
723 p. : |
| Other physical details |
ill. ; |
| Dimensions |
29 cm. |
| 504 ## - BIBLIOGRAPHY, ETC. NOTE |
|---|
| Bibliography, etc. note |
Includes bibliographical references and index |
| 650 #0 - SUBJECT ADDED ENTRY--TOPICAL TERM |
|---|
| Topical term or geographic name entry element |
Microelectronics |
| 650 #0 - SUBJECT ADDED ENTRY--TOPICAL TERM |
|---|
| Topical term or geographic name entry element |
Integrated circuits |
| General subdivision |
Design and construction |
| 650 #0 - SUBJECT ADDED ENTRY--TOPICAL TERM |
|---|
| Topical term or geographic name entry element |
Microelectromechanical systems |
| General subdivision |
Design and construction |
| 650 #0 - SUBJECT ADDED ENTRY--TOPICAL TERM |
|---|
| Topical term or geographic name entry element |
Machining |
| 650 #0 - SUBJECT ADDED ENTRY--TOPICAL TERM |
|---|
| Topical term or geographic name entry element |
Microelectronic packaging |
| 650 #0 - SUBJECT ADDED ENTRY--TOPICAL TERM |
|---|
| Topical term or geographic name entry element |
Lasers |