Normal view MARC view ISBD view

Reliability of MEMS : testing of materials and devices /

Reliability of MEMS : testing of materials and devices / edited by Osamu Tabata and Toshiyuki Tsuchiya - Weinheim : Wiley-VCH , c2008 - xx, 303 p. : ill. ; 25 cm. - Advanced micro & nanosystems v.6 .

"Testing of materials and devices"-- Cover

Includes bibliographical references and index

ISBN: 9783527314942 3527314946

Subjects--Topical Terms:
Microelectromechanical systems--Reliablity

Place hold
Print
Add to your cart (remove)
Save record
BIBTEX Dublin Core MARCXML MARC (non-Unicode/MARC-8) MARC (Unicode/UTF-8) MARC (Unicode/UTF-8, Standard) MODS (XML) RIS ISBD
More searches

Search for this title in:
Other Libraries (WorldCat) Other Databases (Google Scholar) Online Stores (Bookfinder.com) Open Library (openlibrary.org)