Reliability of MEMS : testing of materials and devices / edited by Osamu Tabata and Toshiyuki Tsuchiya

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Material type: Text

TextSeries: Advanced micro & nanosystems ; v.6Publication details: Weinheim : Wiley-VCH , c2008Description: xx, 303 p. : ill. ; 25 cmISBN:

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Holdings
Item type	Current library	Call number	Copy number	Status	Date due	Barcode
Open Shelf	UMPLIB PEKAN	TK7875 .R45 2008 (Browse shelf(Opens below))	1	Available		0000034520

"Testing of materials and devices"-- Cover

Includes bibliographical references and index