MARC details
| 000 -LEADER |
| fixed length control field |
01031nam a2200265 a 4500 |
| 001 - CONTROL NUMBER |
| control field |
vtls000030165 |
| 003 - CONTROL NUMBER IDENTIFIER |
| control field |
KUKTEM |
| 005 - DATE AND TIME OF LATEST TRANSACTION |
| control field |
20251117145135.0 |
| 008 - FIXED-LENGTH DATA ELEMENTS--GENERAL INFORMATION |
| fixed length control field |
080714t2008 gw da f 001 0 eng d |
| 020 ## - INTERNATIONAL STANDARD BOOK NUMBER |
| International Standard Book Number |
9783527314942 |
| 020 ## - INTERNATIONAL STANDARD BOOK NUMBER |
| International Standard Book Number |
3527314946 |
| 039 #9 - LEVEL OF BIBLIOGRAPHIC CONTROL AND CODING DETAIL [OBSOLETE] |
| Level of rules in bibliographic description |
201107132030 |
| Level of effort used to assign nonsubject heading access points |
VLOAD |
| Level of effort used to assign subject headings |
200908141458 |
| Level of effort used to assign classification |
VLOAD |
| Level of effort used to assign subject headings |
200908141429 |
| Level of effort used to assign classification |
VLOAD |
| Level of effort used to assign subject headings |
200908131804 |
| Level of effort used to assign classification |
VLOAD |
| -- |
200807141026 |
| -- |
saini |
| 040 ## - CATALOGING SOURCE |
| Original cataloging agency |
UMP |
| 090 ## - LOCALLY ASSIGNED LC-TYPE CALL NUMBER (OCLC); LOCAL CALL NUMBER (RLIN) |
| Classification number (OCLC) (R) ; Classification number, CALL (RLIN) (NR) |
TK7875 .R45 2008 |
| 245 00 - TITLE STATEMENT |
| Title |
Reliability of MEMS : |
| Remainder of title |
testing of materials and devices / |
| Statement of responsibility, etc. |
edited by Osamu Tabata and Toshiyuki Tsuchiya |
| 260 ## - PUBLICATION, DISTRIBUTION, ETC. |
| Place of publication, distribution, etc. |
Weinheim : |
| Name of publisher, distributor, etc. |
Wiley-VCH , |
| Date of publication, distribution, etc. |
c2008 |
| 300 ## - PHYSICAL DESCRIPTION |
| Extent |
xx, 303 p. : |
| Other physical details |
ill. ; |
| Dimensions |
25 cm. |
| 440 #0 - SERIES STATEMENT/ADDED ENTRY--TITLE |
| Title |
Advanced micro & nanosystems |
| Volume/sequential designation |
v.6 |
| 500 ## - GENERAL NOTE |
| General note |
"Testing of materials and devices"-- Cover |
| 504 ## - BIBLIOGRAPHY, ETC. NOTE |
| Bibliography, etc. note |
Includes bibliographical references and index |
| 650 #0 - SUBJECT ADDED ENTRY--TOPICAL TERM |
| Topical term or geographic name entry element |
Microelectromechanical systems |
| General subdivision |
Reliablity |
| 700 1# - ADDED ENTRY--PERSONAL NAME |
| Personal name |
Tabata, Osamu |
| 700 1# - ADDED ENTRY--PERSONAL NAME |
| Personal name |
Tsuchiya, Toshiyuki |