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Semiconductor manufacturing technology /

Yoo, Chue San.

Semiconductor manufacturing technology / Chue San Yoo. - Hackensack, N.J. ; London : World Scientific, c2008. - xii, 470 p. : ill. ; 24 cm. - Advanced series in electrical and computer engineering ; v. 13 .

Includes bibliographical references and index.

ISBN: 9789812568236 9812568239

Subjects--Topical Terms:
Semiconductors--Design and construction.
Semiconductor industry.

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