MARC details
| 000 -LEADER |
|---|
| fixed length control field |
01072nam a2200265 a 4500 |
| 001 - CONTROL NUMBER |
|---|
| control field |
vtls000032284 |
| 003 - CONTROL NUMBER IDENTIFIER |
|---|
| control field |
KUKTEM |
| 005 - DATE AND TIME OF LATEST TRANSACTION |
|---|
| control field |
20251117145318.0 |
| 008 - FIXED-LENGTH DATA ELEMENTS--GENERAL INFORMATION |
|---|
| fixed length control field |
081114s2008 njua b 001 0 eng |
| 020 ## - INTERNATIONAL STANDARD BOOK NUMBER |
|---|
| International Standard Book Number |
9789812568236 |
| 020 ## - INTERNATIONAL STANDARD BOOK NUMBER |
|---|
| International Standard Book Number |
9812568239 |
| 039 #9 - LEVEL OF BIBLIOGRAPHIC CONTROL AND CODING DETAIL [OBSOLETE] |
|---|
| Level of rules in bibliographic description |
201107132113 |
| Level of effort used to assign nonsubject heading access points |
VLOAD |
| Level of effort used to assign subject headings |
200908141557 |
| Level of effort used to assign classification |
VLOAD |
| Level of effort used to assign subject headings |
200908141529 |
| Level of effort used to assign classification |
VLOAD |
| Level of effort used to assign subject headings |
200908132051 |
| Level of effort used to assign classification |
VLOAD |
| -- |
200811140947 |
| -- |
shah |
| 040 ## - CATALOGING SOURCE |
|---|
| Original cataloging agency |
UMP |
| 090 ## - LOCALLY ASSIGNED LC-TYPE CALL NUMBER (OCLC); LOCAL CALL NUMBER (RLIN) |
|---|
| Classification number (OCLC) (R) ; Classification number, CALL (RLIN) (NR) |
TK7871.85 .Y66 2008 |
| 100 1# - MAIN ENTRY--PERSONAL NAME |
|---|
| Personal name |
Yoo, Chue San. |
| 245 10 - TITLE STATEMENT |
|---|
| Title |
Semiconductor manufacturing technology / |
| Statement of responsibility, etc. |
Chue San Yoo. |
| 260 ## - PUBLICATION, DISTRIBUTION, ETC. |
|---|
| Place of publication, distribution, etc. |
Hackensack, N.J. ; |
| -- |
London : |
| Name of publisher, distributor, etc. |
World Scientific, |
| Date of publication, distribution, etc. |
c2008. |
| 300 ## - PHYSICAL DESCRIPTION |
|---|
| Extent |
xii, 470 p. : |
| Other physical details |
ill. ; |
| Dimensions |
24 cm. |
| 440 #0 - SERIES STATEMENT/ADDED ENTRY--TITLE |
|---|
| Title |
Advanced series in electrical and computer engineering ; |
| Volume/sequential designation |
v. 13 |
| 500 ## - GENERAL NOTE |
|---|
| General note |
Includes bibliographical references and index. |
| 650 #0 - SUBJECT ADDED ENTRY--TOPICAL TERM |
|---|
| Topical term or geographic name entry element |
Semiconductors |
| General subdivision |
Design and construction. |
| 650 #0 - SUBJECT ADDED ENTRY--TOPICAL TERM |
|---|
| Topical term or geographic name entry element |
Semiconductor industry. |
| 856 41 - ELECTRONIC LOCATION AND ACCESS |
|---|
| Materials specified |
Table of contents |
| Uniform Resource Identifier |
<a href="http://www.loc.gov/catdir/toc/fy0804/2008299033.html">http://www.loc.gov/catdir/toc/fy0804/2008299033.html</a> |