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Semiconductor manufacturing technology / Chue San Yoo.
Material type:
TextSeries: Advanced series in electrical and computer engineering ; v. 13Publication details: Hackensack, N.J. ; London : World Scientific, c2008.Description: xii, 470 p. : ill. ; 24 cmISBN: - 9789812568236
- 9812568239
| Item type | Current library | Call number | Copy number | Status | Date due | Barcode | |
|---|---|---|---|---|---|---|---|
Open Shelf
|
UMPLIB PEKAN | TK7871.85 .Y66 2008 (Browse shelf(Opens below)) | 1 | Available | 0000035322 |
Includes bibliographical references and index.