Advanced metallization for future ULSI : symposium held April 8-11, 1996, San Francisco, California, U.S.A. /
Advanced metallization for future ULSI : symposium held April 8-11, 1996, San Francisco, California, U.S.A. /
editors, K.N. Tu ... [et al.]
- Pittsburgh, Pa : Materials Research Society , c1996
- xiii, 597 p. : ill. ; 24 cm.
- Materials Research Society symposium proceedings ; v. 427 .
- Materials Research Society symposia proceedings ; v.427 .
Papers presented at the symposium on advanced metallization for future ULSI, which was part of the 1996 MRS spring meeting of Materials Research Society held in San Francisco from April 8-12, 1996
Includes bibliographical references and indexes
9781558993303 1558993304
Integrated circuits--Ultra large scale integration--Design and construction--Congresses
Metallizing--Congresses
Metallic films--Congresses
Semiconductors--Design and construction--Congresses
Papers presented at the symposium on advanced metallization for future ULSI, which was part of the 1996 MRS spring meeting of Materials Research Society held in San Francisco from April 8-12, 1996
Includes bibliographical references and indexes
9781558993303 1558993304
Integrated circuits--Ultra large scale integration--Design and construction--Congresses
Metallizing--Congresses
Metallic films--Congresses
Semiconductors--Design and construction--Congresses