MARC details
| 000 -LEADER |
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| fixed length control field |
01550nam a2200313 a 4500 |
| 001 - CONTROL NUMBER |
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| control field |
vtls000060049 |
| 003 - CONTROL NUMBER IDENTIFIER |
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| control field |
KUKTEM |
| 005 - DATE AND TIME OF LATEST TRANSACTION |
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| control field |
20251117145441.0 |
| 008 - FIXED-LENGTH DATA ELEMENTS--GENERAL INFORMATION |
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| fixed length control field |
120522t1996 paua f b 101 0 eng d |
| 020 ## - INTERNATIONAL STANDARD BOOK NUMBER |
|---|
| International Standard Book Number |
9781558993303 |
| 020 ## - INTERNATIONAL STANDARD BOOK NUMBER |
|---|
| International Standard Book Number |
1558993304 |
| 039 #9 - LEVEL OF BIBLIOGRAPHIC CONTROL AND CODING DETAIL [OBSOLETE] |
|---|
| Level of rules in bibliographic description |
201212051147 |
| Level of effort used to assign nonsubject heading access points |
fauzi |
| -- |
201205221555 |
| -- |
safura |
| 040 ## - CATALOGING SOURCE |
|---|
| Original cataloging agency |
UMP |
| 090 ## - LOCALLY ASSIGNED LC-TYPE CALL NUMBER (OCLC); LOCAL CALL NUMBER (RLIN) |
|---|
| Classification number (OCLC) (R) ; Classification number, CALL (RLIN) (NR) |
TK7874.76 .A383 1996 |
| 245 00 - TITLE STATEMENT |
|---|
| Title |
Advanced metallization for future ULSI : |
| Remainder of title |
symposium held April 8-11, 1996, San Francisco, California, U.S.A. / |
| Statement of responsibility, etc. |
editors, K.N. Tu ... [et al.] |
| 260 ## - PUBLICATION, DISTRIBUTION, ETC. |
|---|
| Place of publication, distribution, etc. |
Pittsburgh, Pa : |
| Name of publisher, distributor, etc. |
Materials Research Society , |
| Date of publication, distribution, etc. |
c1996 |
| 300 ## - PHYSICAL DESCRIPTION |
|---|
| Extent |
xiii, 597 p. : |
| Other physical details |
ill. ; |
| Dimensions |
24 cm. |
| 490 1# - SERIES STATEMENT |
|---|
| Series statement |
Materials Research Society symposium proceedings ; |
| Volume/sequential designation |
v. 427 |
| 500 ## - GENERAL NOTE |
|---|
| General note |
Papers presented at the symposium on advanced metallization for future ULSI, which was part of the 1996 MRS spring meeting of Materials Research Society held in San Francisco from April 8-12, 1996 |
| 504 ## - BIBLIOGRAPHY, ETC. NOTE |
|---|
| Bibliography, etc. note |
Includes bibliographical references and indexes |
| 650 #0 - SUBJECT ADDED ENTRY--TOPICAL TERM |
|---|
| Topical term or geographic name entry element |
Integrated circuits |
| General subdivision |
Ultra large scale integration |
| -- |
Design and construction |
| Form subdivision |
Congresses |
| 650 #0 - SUBJECT ADDED ENTRY--TOPICAL TERM |
|---|
| Topical term or geographic name entry element |
Metallizing |
| Form subdivision |
Congresses |
| 650 #0 - SUBJECT ADDED ENTRY--TOPICAL TERM |
|---|
| Topical term or geographic name entry element |
Metallic films |
| Form subdivision |
Congresses |
| 650 #0 - SUBJECT ADDED ENTRY--TOPICAL TERM |
|---|
| Topical term or geographic name entry element |
Semiconductors |
| General subdivision |
Design and construction |
| Form subdivision |
Congresses |
| 700 1# - ADDED ENTRY--PERSONAL NAME |
|---|
| Personal name |
Tu, K. N. |
| 710 2# - ADDED ENTRY--CORPORATE NAME |
|---|
| Corporate name or jurisdiction name as entry element |
Materials Research Society. |
| Subordinate unit |
Meeting |
| Date of meeting or treaty signing |
(1996 : |
| Location of meeting |
San Francisco, Calif.) |
| 830 #0 - SERIES ADDED ENTRY--UNIFORM TITLE |
|---|
| Uniform title |
Materials Research Society symposia proceedings ; |
| Volume/sequential designation |
v.427 |