Advanced metallization for future ULSI : symposium held April 8-11, 1996, San Francisco, California, U.S.A. / editors, K.N. Tu ... [et al.]

Contributor(s):

Tu, K. N
Materials Research Society. Meeting (1996 : San Francisco, Calif.)

Material type: Text

TextSeries: Materials Research Society symposia proceedings ; v.427Publication details: Pittsburgh, Pa : Materials Research Society , c1996Description: xiii, 597 p. : ill. ; 24 cmISBN:

9781558993303
1558993304

Subject(s):

Integrated circuits -- Ultra large scale integration -- Design and construction -- Congresses
Metallizing -- Congresses
Metallic films -- Congresses
Semiconductors -- Design and construction -- Congresses

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Title notes ( 2 )

Holdings
Item type	Current library	Call number	Copy number	Status	Date due	Barcode
Open Shelf	UMPLIB PEKAN	TK7874.76 .A383 1996 (Browse shelf(Opens below))	1	Available		0000068308

Papers presented at the symposium on advanced metallization for future ULSI, which was part of the 1996 MRS spring meeting of Materials Research Society held in San Francisco from April 8-12, 1996

Includes bibliographical references and indexes

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