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Microelectronic applications of chemical mechanical planarization /

Microelectronic applications of chemical mechanical planarization / edited by Yuzhuo Li - Hoboken, N.J. : John Wiley, 2007 - xxv, 734 p. : ill. ; 24 cm.

"Wiley Interscience."

Includes bibliographical references

ISBN: 9780471719199

Subjects--Topical Terms:
Integrated circuits--Design and construction
Chemical mechanical planarization
Microelectronics--Materials

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