Microelectronic applications of chemical mechanical planarization / edited by Yuzhuo Li

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Material type: Text

TextPublication details: Hoboken, N.J. : John Wiley, 2007Description: xxv, 734 p. : ill. ; 24 cmISBN:

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Holdings
Item type	Current library	Call number	Copy number	Status	Date due	Barcode
Open Shelf	UMPLIB PEKAN	TK7874 .M536 2007 (Browse shelf(Opens below))	1	Available		0000038353

"Wiley Interscience."

Includes bibliographical references