MARC details
| 000 -LEADER |
|---|
| fixed length control field |
01064nam a2200265 a 4500 |
| 001 - CONTROL NUMBER |
|---|
| control field |
vtls000032295 |
| 003 - CONTROL NUMBER IDENTIFIER |
|---|
| control field |
KUKTEM |
| 005 - DATE AND TIME OF LATEST TRANSACTION |
|---|
| control field |
20251117145453.0 |
| 008 - FIXED-LENGTH DATA ELEMENTS--GENERAL INFORMATION |
|---|
| fixed length control field |
081114t2007 njua f 000 0 eng d |
| 020 ## - INTERNATIONAL STANDARD BOOK NUMBER |
|---|
| International Standard Book Number |
9780471719199 |
| 039 #9 - LEVEL OF BIBLIOGRAPHIC CONTROL AND CODING DETAIL [OBSOLETE] |
|---|
| Level of rules in bibliographic description |
201107132155 |
| Level of effort used to assign nonsubject heading access points |
VLOAD |
| Level of effort used to assign subject headings |
200908141649 |
| Level of effort used to assign classification |
VLOAD |
| Level of effort used to assign subject headings |
200908141630 |
| Level of effort used to assign classification |
VLOAD |
| Level of effort used to assign subject headings |
200908132128 |
| Level of effort used to assign classification |
VLOAD |
| -- |
200811141605 |
| -- |
saini |
| 040 ## - CATALOGING SOURCE |
|---|
| Original cataloging agency |
UMP |
| 090 ## - LOCALLY ASSIGNED LC-TYPE CALL NUMBER (OCLC); LOCAL CALL NUMBER (RLIN) |
|---|
| Classification number (OCLC) (R) ; Classification number, CALL (RLIN) (NR) |
TK7874 .M536 2007 |
| 245 00 - TITLE STATEMENT |
|---|
| Title |
Microelectronic applications of chemical mechanical planarization / |
| Statement of responsibility, etc. |
edited by Yuzhuo Li |
| 260 ## - PUBLICATION, DISTRIBUTION, ETC. |
|---|
| Place of publication, distribution, etc. |
Hoboken, N.J. : |
| Name of publisher, distributor, etc. |
John Wiley, |
| Date of publication, distribution, etc. |
2007 |
| 300 ## - PHYSICAL DESCRIPTION |
|---|
| Extent |
xxv, 734 p. : |
| Other physical details |
ill. ; |
| Dimensions |
24 cm. |
| 500 ## - GENERAL NOTE |
|---|
| General note |
"Wiley Interscience." |
| 504 ## - BIBLIOGRAPHY, ETC. NOTE |
|---|
| Bibliography, etc. note |
Includes bibliographical references |
| 650 #0 - SUBJECT ADDED ENTRY--TOPICAL TERM |
|---|
| Topical term or geographic name entry element |
Integrated circuits |
| General subdivision |
Design and construction |
| 650 #0 - SUBJECT ADDED ENTRY--TOPICAL TERM |
|---|
| Topical term or geographic name entry element |
Chemical mechanical planarization |
| 650 #0 - SUBJECT ADDED ENTRY--TOPICAL TERM |
|---|
| Topical term or geographic name entry element |
Microelectronics |
| General subdivision |
Materials |
| 700 1# - ADDED ENTRY--PERSONAL NAME |
|---|
| Personal name |
Li, Yuzhuo |
| 856 41 - ELECTRONIC LOCATION AND ACCESS |
|---|
| Materials specified |
Table of contents only |
| Uniform Resource Identifier |
<a href="http://www.loc.gov/catdir/toc/ecip0715/2007015557.html">http://www.loc.gov/catdir/toc/ecip0715/2007015557.html</a> |