Nanoparticle engineering for chemical-mechanical planarization : fabrication of next-generation nanodevices /
Paik, Ungyu
Nanoparticle engineering for chemical-mechanical planarization : fabrication of next-generation nanodevices / Ungyu Paik, Jea-Gun Park - Boca Raton, FL : CRC Press/Taylor & Francis Group, c2009 - xiii, 191 p., [14] p. of plates : ill. (some col.) ; 25 cm.
Includes bibliographical references and index
1420059114 9781420059113
Chemical mechanical planarization
Nanoparticles
Nanoelectronics
Nanoparticle engineering for chemical-mechanical planarization : fabrication of next-generation nanodevices / Ungyu Paik, Jea-Gun Park - Boca Raton, FL : CRC Press/Taylor & Francis Group, c2009 - xiii, 191 p., [14] p. of plates : ill. (some col.) ; 25 cm.
Includes bibliographical references and index
1420059114 9781420059113
Chemical mechanical planarization
Nanoparticles
Nanoelectronics