MARC details
| 000 -LEADER |
|---|
| fixed length control field |
01040nam a2200265 a 4500 |
| 001 - CONTROL NUMBER |
|---|
| control field |
vtls000043900 |
| 003 - CONTROL NUMBER IDENTIFIER |
|---|
| control field |
KUKTEM |
| 005 - DATE AND TIME OF LATEST TRANSACTION |
|---|
| control field |
20251117145511.0 |
| 008 - FIXED-LENGTH DATA ELEMENTS--GENERAL INFORMATION |
|---|
| fixed length control field |
090911t2009 flua f b 001 0 eng d |
| 020 ## - INTERNATIONAL STANDARD BOOK NUMBER |
|---|
| International Standard Book Number |
1420059114 |
| 020 ## - INTERNATIONAL STANDARD BOOK NUMBER |
|---|
| International Standard Book Number |
9781420059113 |
| 039 #9 - LEVEL OF BIBLIOGRAPHIC CONTROL AND CODING DETAIL [OBSOLETE] |
|---|
| Level of rules in bibliographic description |
201204191039 |
| Level of effort used to assign nonsubject heading access points |
ida |
| Level of effort used to assign subject headings |
201107132214 |
| Level of effort used to assign classification |
VLOAD |
| Level of effort used to assign subject headings |
201009151608 |
| Level of effort used to assign classification |
jamie |
| -- |
200909111027 |
| -- |
safura |
| 040 ## - CATALOGING SOURCE |
|---|
| Original cataloging agency |
UMP |
| 090 ## - LOCALLY ASSIGNED LC-TYPE CALL NUMBER (OCLC); LOCAL CALL NUMBER (RLIN) |
|---|
| Classification number (OCLC) (R) ; Classification number, CALL (RLIN) (NR) |
TK7874.84 .P35 2009 |
| 100 1# - MAIN ENTRY--PERSONAL NAME |
|---|
| Personal name |
Paik, Ungyu |
| 245 10 - TITLE STATEMENT |
|---|
| Title |
Nanoparticle engineering for chemical-mechanical planarization : |
| Remainder of title |
fabrication of next-generation nanodevices / |
| Statement of responsibility, etc. |
Ungyu Paik, Jea-Gun Park |
| 260 ## - PUBLICATION, DISTRIBUTION, ETC. |
|---|
| Place of publication, distribution, etc. |
Boca Raton, FL : |
| Name of publisher, distributor, etc. |
CRC Press/Taylor & Francis Group, |
| Date of publication, distribution, etc. |
c2009 |
| 300 ## - PHYSICAL DESCRIPTION |
|---|
| Extent |
xiii, 191 p., [14] p. of plates : |
| Other physical details |
ill. (some col.) ; |
| Dimensions |
25 cm. |
| 504 ## - BIBLIOGRAPHY, ETC. NOTE |
|---|
| Bibliography, etc. note |
Includes bibliographical references and index |
| 650 #0 - SUBJECT ADDED ENTRY--TOPICAL TERM |
|---|
| Topical term or geographic name entry element |
Chemical mechanical planarization |
| 650 #0 - SUBJECT ADDED ENTRY--TOPICAL TERM |
|---|
| Topical term or geographic name entry element |
Nanoparticles |
| 650 #0 - SUBJECT ADDED ENTRY--TOPICAL TERM |
|---|
| Topical term or geographic name entry element |
Nanoelectronics |
| 700 1# - ADDED ENTRY--PERSONAL NAME |
|---|
| Personal name |
Park, Jea-Gun |