Nanoparticle engineering for chemical-mechanical planarization : fabrication of next-generation nanodevices / Ungyu Paik, Jea-Gun Park

By:

Contributor(s):

Material type: Text

TextPublication details: Boca Raton, FL : CRC Press/Taylor & Francis Group, c2009Description: xiii, 191 p., [14] p. of plates : ill. (some col.) ; 25 cmISBN:

Subject(s):

Tags from this library: No tags from this library for this title. Log in to add tags.

Average rating: 0.0 (0 votes)

Holdings
Item type	Current library	Call number	Copy number	Status	Date due	Barcode
Open Shelf	UMPLIB PEKAN	TK7874.84 .P35 2009 (Browse shelf(Opens below))	1	Available		0000049640

Includes bibliographical references and index