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Computational lithography /

Ma, Xu

Computational lithography / Xu Ma and Gonzalo R. Arce - Hoboken, N.J. : Wiley, c2010 - xv, 226 p. : ill. ; 25 cm. - Wiley series in pure and applied optics .

Includes bibliographical references (p. 217-222) and index

ISBN: 9780470596975 047059697X

Subjects--Topical Terms:
Microlithography--Mathematics
Integrated circuits--Design and construction--Mathematics
Photolithography--Mathematics
Semiconductors--Etching--Mathematics
Resolution (Optics)

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