MARC details
| 000 -LEADER |
|---|
| fixed length control field |
01122nam a2200301 a 4500 |
| 001 - CONTROL NUMBER |
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| control field |
vtls000052763 |
| 003 - CONTROL NUMBER IDENTIFIER |
|---|
| control field |
KUKTEM |
| 005 - DATE AND TIME OF LATEST TRANSACTION |
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| control field |
20251117150456.0 |
| 008 - FIXED-LENGTH DATA ELEMENTS--GENERAL INFORMATION |
|---|
| fixed length control field |
110411t2010 njua f 001 0 eng d |
| 020 ## - INTERNATIONAL STANDARD BOOK NUMBER |
|---|
| International Standard Book Number |
9780470596975 |
| 020 ## - INTERNATIONAL STANDARD BOOK NUMBER |
|---|
| International Standard Book Number |
047059697X |
| 039 #9 - LEVEL OF BIBLIOGRAPHIC CONTROL AND CODING DETAIL [OBSOLETE] |
|---|
| Level of rules in bibliographic description |
201111021342 |
| Level of effort used to assign nonsubject heading access points |
ida |
| Level of effort used to assign subject headings |
201110131150 |
| Level of effort used to assign classification |
asmadi |
| Level of effort used to assign subject headings |
201107140044 |
| Level of effort used to assign classification |
VLOAD |
| -- |
201104111604 |
| -- |
safura |
| 040 ## - CATALOGING SOURCE |
|---|
| Original cataloging agency |
UMP |
| 090 ## - LOCALLY ASSIGNED LC-TYPE CALL NUMBER (OCLC); LOCAL CALL NUMBER (RLIN) |
|---|
| Classification number (OCLC) (R) ; Classification number, CALL (RLIN) (NR) |
TK7872.M3 M39 2010 |
| 100 1# - MAIN ENTRY--PERSONAL NAME |
|---|
| Personal name |
Ma, Xu |
| 245 10 - TITLE STATEMENT |
|---|
| Title |
Computational lithography / |
| Statement of responsibility, etc. |
Xu Ma and Gonzalo R. Arce |
| 260 ## - PUBLICATION, DISTRIBUTION, ETC. |
|---|
| Place of publication, distribution, etc. |
Hoboken, N.J. : |
| Name of publisher, distributor, etc. |
Wiley, |
| Date of publication, distribution, etc. |
c2010 |
| 300 ## - PHYSICAL DESCRIPTION |
|---|
| Extent |
xv, 226 p. : |
| Other physical details |
ill. ; |
| Dimensions |
25 cm. |
| 490 0# - SERIES STATEMENT |
|---|
| Series statement |
Wiley series in pure and applied optics |
| 504 ## - BIBLIOGRAPHY, ETC. NOTE |
|---|
| Bibliography, etc. note |
Includes bibliographical references (p. 217-222) and index |
| 650 #0 - SUBJECT ADDED ENTRY--TOPICAL TERM |
|---|
| Topical term or geographic name entry element |
Microlithography |
| General subdivision |
Mathematics |
| 650 #0 - SUBJECT ADDED ENTRY--TOPICAL TERM |
|---|
| Topical term or geographic name entry element |
Integrated circuits |
| General subdivision |
Design and construction |
| -- |
Mathematics |
| 650 #0 - SUBJECT ADDED ENTRY--TOPICAL TERM |
|---|
| Topical term or geographic name entry element |
Photolithography |
| General subdivision |
Mathematics |
| 650 #0 - SUBJECT ADDED ENTRY--TOPICAL TERM |
|---|
| Topical term or geographic name entry element |
Semiconductors |
| General subdivision |
Etching |
| -- |
Mathematics |
| 650 #0 - SUBJECT ADDED ENTRY--TOPICAL TERM |
|---|
| Topical term or geographic name entry element |
Resolution (Optics) |
| 700 1# - ADDED ENTRY--PERSONAL NAME |
|---|
| Personal name |
Arce, Gonzalo R. |