Computational lithography / Xu Ma and Gonzalo R. Arce

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Material type: Text

TextSeries: Wiley series in pure and applied opticsPublication details: Hoboken, N.J. : Wiley, c2010Description: xv, 226 p. : ill. ; 25 cmISBN:

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Holdings
Item type	Current library	Call number	Copy number	Status	Date due	Barcode
Open Shelf	UMPLIB GAMBANG	TK7872.M3 M39 2010 (Browse shelf(Opens below))	1	Available		0000059760

Includes bibliographical references (p. 217-222) and index