Advances in chemical-mechanical polishing : symposium held April 13-15, 2004, San Francisco, California, U.S.A. /
Advances in chemical-mechanical polishing : symposium held April 13-15, 2004, San Francisco, California, U.S.A. /
editors, Duane S. Boning ... [et al.]
- v. 816
- Warrendale, PA. : Materials Research Society, c2004
- xi, 292 p. : ill. ; 24 cm.
- Materials Research Society symposium proceedings ; v. 816 .
- Materials Research Society symposium proceedings ; v. 816 .
"The papers here were presented at Symposium K, ’Advances in Chemical-Mechanical Polishing,’ held April 13-15 at the 2004 MRS Spring Meeting in San Francisco, California ..."--p. xi
Includes bibliographical references and index
9781558997660 1558997660
Electrolytic polishing--Congresses
Grinding and polishing--Congresses
Chemical mechanical planarization--Congresses
"The papers here were presented at Symposium K, ’Advances in Chemical-Mechanical Polishing,’ held April 13-15 at the 2004 MRS Spring Meeting in San Francisco, California ..."--p. xi
Includes bibliographical references and index
9781558997660 1558997660
Electrolytic polishing--Congresses
Grinding and polishing--Congresses
Chemical mechanical planarization--Congresses