MARC details
| 000 -LEADER |
|---|
| fixed length control field |
01448nam a2200313 a 4500 |
| 001 - CONTROL NUMBER |
|---|
| control field |
vtls000060094 |
| 003 - CONTROL NUMBER IDENTIFIER |
|---|
| control field |
KUKTEM |
| 005 - DATE AND TIME OF LATEST TRANSACTION |
|---|
| control field |
20251125093238.0 |
| 008 - FIXED-LENGTH DATA ELEMENTS--GENERAL INFORMATION |
|---|
| fixed length control field |
120523t2004 paua f 001 0 eng d |
| 020 ## - INTERNATIONAL STANDARD BOOK NUMBER |
|---|
| International Standard Book Number |
9781558997660 |
| 020 ## - INTERNATIONAL STANDARD BOOK NUMBER |
|---|
| International Standard Book Number |
1558997660 |
| 039 #9 - LEVEL OF BIBLIOGRAPHIC CONTROL AND CODING DETAIL [OBSOLETE] |
|---|
| Level of rules in bibliographic description |
201211281206 |
| Level of effort used to assign nonsubject heading access points |
asmadi |
| Level of effort used to assign subject headings |
201211281135 |
| Level of effort used to assign classification |
asmadi |
| -- |
201205231011 |
| -- |
safura |
| 040 ## - CATALOGING SOURCE |
|---|
| Original cataloging agency |
UMP |
| 090 ## - LOCALLY ASSIGNED LC-TYPE CALL NUMBER (OCLC); LOCAL CALL NUMBER (RLIN) |
|---|
| Classification number (OCLC) (R) ; Classification number, CALL (RLIN) (NR) |
TS654.5 .A38 2004 |
| 111 2# - MAIN ENTRY--MEETING NAME |
|---|
| Meeting name or jurisdiction name as entry element |
Symposium |
| 245 00 - TITLE STATEMENT |
|---|
| Title |
Advances in chemical-mechanical polishing : |
| Remainder of title |
symposium held April 13-15, 2004, San Francisco, California, U.S.A. / |
| Statement of responsibility, etc. |
editors, Duane S. Boning ... [et al.] |
| 250 ## - EDITION STATEMENT |
|---|
| Edition statement |
v. 816 |
| 260 ## - PUBLICATION, DISTRIBUTION, ETC. |
|---|
| Place of publication, distribution, etc. |
Warrendale, PA. : |
| Name of publisher, distributor, etc. |
Materials Research Society, |
| Date of publication, distribution, etc. |
c2004 |
| 300 ## - PHYSICAL DESCRIPTION |
|---|
| Extent |
xi, 292 p. : |
| Other physical details |
ill. ; |
| Dimensions |
24 cm. |
| 490 1# - SERIES STATEMENT |
|---|
| Series statement |
Materials Research Society symposium proceedings ; |
| Volume/sequential designation |
v. 816 |
| 500 ## - GENERAL NOTE |
|---|
| General note |
"The papers here were presented at Symposium K, ’Advances in Chemical-Mechanical Polishing,’ held April 13-15 at the 2004 MRS Spring Meeting in San Francisco, California ..."--p. xi |
| 504 ## - BIBLIOGRAPHY, ETC. NOTE |
|---|
| Bibliography, etc. note |
Includes bibliographical references and index |
| 650 #0 - SUBJECT ADDED ENTRY--TOPICAL TERM |
|---|
| Topical term or geographic name entry element |
Electrolytic polishing |
| Form subdivision |
Congresses |
| 650 #0 - SUBJECT ADDED ENTRY--TOPICAL TERM |
|---|
| Topical term or geographic name entry element |
Grinding and polishing |
| Form subdivision |
Congresses |
| 650 #0 - SUBJECT ADDED ENTRY--TOPICAL TERM |
|---|
| Topical term or geographic name entry element |
Chemical mechanical planarization |
| Form subdivision |
Congresses |
| 700 1# - ADDED ENTRY--PERSONAL NAME |
|---|
| Personal name |
Boning, Duane S. |
| 830 #0 - SERIES ADDED ENTRY--UNIFORM TITLE |
|---|
| Uniform title |
Materials Research Society symposium proceedings ; |
| Volume/sequential designation |
v. 816 |