Advances in chemical-mechanical polishing : symposium held April 13-15, 2004, San Francisco, California, U.S.A. / editors, Duane S. Boning ... [et al.]

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Symposium

Contributor(s):

Boning, Duane S

Material type: Text

TextSeries: Materials Research Society symposium proceedings ; v. 816Publication details: Warrendale, PA. : Materials Research Society, c2004Edition: v. 816Description: xi, 292 p. : ill. ; 24 cmISBN:

9781558997660
1558997660

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Title notes ( 2 )

Holdings
Item type	Current library	Call number	Copy number	Status	Date due	Barcode
Open Shelf	UMPLIB GAMBANG	TS654.5 .A38 2004 (Browse shelf(Opens below))	1	Available		0000068358

"The papers here were presented at Symposium K, ’Advances in Chemical-Mechanical Polishing,’ held April 13-15 at the 2004 MRS Spring Meeting in San Francisco, California ..."--p. xi

Includes bibliographical references and index