CMOS gate-stack scaling-- materials, interfaces and reliability implications : symposium held April 14-16, 2009, San Francisco, California, U.S.A. /
CMOS gate-stack scaling-- materials, interfaces and reliability implications : symposium held April 14-16, 2009, San Francisco, California, U.S.A. /
editors, Alexander A. Demkov ... [et al.]
- Warrendale, Pa. : Materials Research Society, 2009
- viii, 179 p. : ill. ; 24 cm.
- Materials Research Society symposium proceedings v. 1155 .
- Materials Research Society symposium proceedings v. 1155 .
" ... Symposium C, ’CMOS Gate-Stack Scaling-- Materials, Interfaces and Reliability Implications,’ held April 14-16 at the 2009 MRS Spring Meeting in San Francisco, California" -- Preface
Includes bibliographical references and indexes
9781605111285 1605111287
Metal oxide semiconductors, Complementary--Congresses
Metal oxide semiconductors--Materials--Congresses
Silicides--Congresses
Gate array circuits--Congresses
" ... Symposium C, ’CMOS Gate-Stack Scaling-- Materials, Interfaces and Reliability Implications,’ held April 14-16 at the 2009 MRS Spring Meeting in San Francisco, California" -- Preface
Includes bibliographical references and indexes
9781605111285 1605111287
Metal oxide semiconductors, Complementary--Congresses
Metal oxide semiconductors--Materials--Congresses
Silicides--Congresses
Gate array circuits--Congresses