CMOS gate-stack scaling-- materials, interfaces and reliability implications : symposium held April 14-16, 2009, San Francisco, California, U.S.A. / editors, Alexander A. Demkov ... [et al.]

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Material type: Text

TextSeries: Materials Research Society symposium proceedings ; v. 1155Publication details: Warrendale, Pa. : Materials Research Society, 2009Description: viii, 179 p. : ill. ; 24 cmISBN:

9781605111285
1605111287

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Holdings
Item type	Current library	Call number	Copy number	Status	Date due	Barcode
Open Shelf	UMPLIB PEKAN	TK7871.99.M44 C56 2009 (Browse shelf(Opens below))	1	Available		0000068200

" ... Symposium C, ’CMOS Gate-Stack Scaling-- Materials, Interfaces and Reliability Implications,’ held April 14-16 at the 2009 MRS Spring Meeting in San Francisco, California" -- Preface

Includes bibliographical references and indexes