Normal view MARC view ISBD view

Advanced metallization and interconnect systems for ULSI applications in 1997 : proceedings of the conference held September 30-October 2,1997, in San Diego, California, sponsored by Continuing Education in Engineering, University Extension, University of California at Berkeley, California, U.S.A., a parallel session of the conference was held from October 21-22, 1997, in Tokyo, Japan /

Advanced metallization and interconnect systems for ULSI applications in 1997 : proceedings of the conference held September 30-October 2,1997, in San Diego, California, sponsored by Continuing Education in Engineering, University Extension, University of California at Berkeley, California, U.S.A., a parallel session of the conference was held from October 21-22, 1997, in Tokyo, Japan / editors, Robin Cheung ... [et al.] - Warrendale, Pa. : Materials Research Society, c1998 - xviii, 765 p. : ill. ; 24 cm. - Conference proceedings, 1048-0854 . - Materials Research Society conference proceedings .

Includes bibliographical references and indexes

ISBN: 9781558994126 1558994122

Subjects--Topical Terms:
Integrated circuits--Ultra large scale integration--Design and construction--Congresses
Integrated circuits--Ultra large scale integration--Materials--Congresses
Vapor-plating--Congresses
Electrochemical metallizing--Congresses
Dielectrics--Congresses