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Advanced metallization and interconnect systems for ULSI applications in 1997 : proceedings of the conference held September 30-October 2,1997, in San Diego, California, sponsored by Continuing Education in Engineering, University Extension, University of California at Berkeley, California, U.S.A., a parallel session of the conference was held from October 21-22, 1997, in Tokyo, Japan / editors, Robin Cheung ... [et al.]
Material type:
TextSeries: Materials Research Society conference proceedingsPublication details: Warrendale, Pa. : Materials Research Society, c1998Description: xviii, 765 p. : ill. ; 24 cmISBN: - 9781558994126
- 1558994122
| Item type | Current library | Call number | Copy number | Status | Date due | Barcode | |
|---|---|---|---|---|---|---|---|
Open Shelf
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UMPLIB PEKAN | TK7874.76 .A38 1998 (Browse shelf(Opens below)) | 1 | Available | 0000068303 |
Includes bibliographical references and indexes