MARC details
| 000 -LEADER |
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| fixed length control field |
01675nam a2200313 a 4500 |
| 001 - CONTROL NUMBER |
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| control field |
vtls000059969 |
| 003 - CONTROL NUMBER IDENTIFIER |
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| control field |
KUKTEM |
| 005 - DATE AND TIME OF LATEST TRANSACTION |
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| control field |
20251125093413.0 |
| 008 - FIXED-LENGTH DATA ELEMENTS--GENERAL INFORMATION |
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| fixed length control field |
120522t1998 paua f b 101 0 eng d |
| 020 ## - INTERNATIONAL STANDARD BOOK NUMBER |
|---|
| International Standard Book Number |
9781558994126 |
| 020 ## - INTERNATIONAL STANDARD BOOK NUMBER |
|---|
| International Standard Book Number |
1558994122 |
| 039 #9 - LEVEL OF BIBLIOGRAPHIC CONTROL AND CODING DETAIL [OBSOLETE] |
|---|
| Level of rules in bibliographic description |
201212031247 |
| Level of effort used to assign nonsubject heading access points |
fauzi |
| -- |
201205221126 |
| -- |
safura |
| 040 ## - CATALOGING SOURCE |
|---|
| Original cataloging agency |
UMP |
| 090 ## - LOCALLY ASSIGNED LC-TYPE CALL NUMBER (OCLC); LOCAL CALL NUMBER (RLIN) |
|---|
| Classification number (OCLC) (R) ; Classification number, CALL (RLIN) (NR) |
TK7874.76 .A38 1998 |
| 245 00 - TITLE STATEMENT |
|---|
| Title |
Advanced metallization and interconnect systems for ULSI applications in 1997 : |
| Remainder of title |
proceedings of the conference held September 30-October 2,1997, in San Diego, California, sponsored by Continuing Education in Engineering, University Extension, University of California at Berkeley, California, U.S.A., a parallel session of the conference was held from October 21-22, 1997, in Tokyo, Japan / |
| Statement of responsibility, etc. |
editors, Robin Cheung ... [et al.] |
| 260 ## - PUBLICATION, DISTRIBUTION, ETC. |
|---|
| Place of publication, distribution, etc. |
Warrendale, Pa. : |
| Name of publisher, distributor, etc. |
Materials Research Society, |
| Date of publication, distribution, etc. |
c1998 |
| 300 ## - PHYSICAL DESCRIPTION |
|---|
| Extent |
xviii, 765 p. : |
| Other physical details |
ill. ; |
| Dimensions |
24 cm. |
| 490 1# - SERIES STATEMENT |
|---|
| Series statement |
Conference proceedings, |
| International Standard Serial Number |
1048-0854 |
| 504 ## - BIBLIOGRAPHY, ETC. NOTE |
|---|
| Bibliography, etc. note |
Includes bibliographical references and indexes |
| 650 #0 - SUBJECT ADDED ENTRY--TOPICAL TERM |
|---|
| Topical term or geographic name entry element |
Integrated circuits |
| General subdivision |
Ultra large scale integration |
| -- |
Design and construction |
| -- |
Congresses |
| 650 #0 - SUBJECT ADDED ENTRY--TOPICAL TERM |
|---|
| Topical term or geographic name entry element |
Integrated circuits |
| General subdivision |
Ultra large scale integration |
| -- |
Materials |
| -- |
Congresses |
| 650 #0 - SUBJECT ADDED ENTRY--TOPICAL TERM |
|---|
| Topical term or geographic name entry element |
Vapor-plating |
| General subdivision |
Congresses |
| 650 #0 - SUBJECT ADDED ENTRY--TOPICAL TERM |
|---|
| Topical term or geographic name entry element |
Electrochemical metallizing |
| General subdivision |
Congresses |
| 650 #0 - SUBJECT ADDED ENTRY--TOPICAL TERM |
|---|
| Topical term or geographic name entry element |
Dielectrics |
| General subdivision |
Congresses |
| 700 1# - ADDED ENTRY--PERSONAL NAME |
|---|
| Personal name |
Cheung, Robin |
| 710 2# - ADDED ENTRY--CORPORATE NAME |
|---|
| Corporate name or jurisdiction name as entry element |
University of California, Berkeley. |
| Subordinate unit |
Continuing Education in Engineering |
| 830 #0 - SERIES ADDED ENTRY--UNIFORM TITLE |
|---|
| Uniform title |
Materials Research Society conference proceedings |