Fundamentals of microfabrication and nanotechnology /
Madou, Marc J.
Fundamentals of microfabrication and nanotechnology / Marc J. Madou - 3rd ed. - Boca Raton, FL : CRC Press, c2012 - 3 v. : ill. (some col.) ; 29 cm.
Includes bibliographical references and index
V. 1. Solid-state physics, fluidics, and analytical techniques in micro- and nanotechnology -- v. 2. Manufacturing techniques for microfabrication and nanotechnology -- v. 3. From MEMS to Bio-MEMS and Bio-Nems, Manufacturaing techniques and applications
9781420055115 (v.1) 1420055119 (v.1) 9781420055191 (v.2) 1420055194 (v.2) 9781420055160 (v.3) 142005516X (v.3)
Microelectromechanical systems
Nanoelectromechanical systems
Microfluidics
Fundamentals of microfabrication and nanotechnology / Marc J. Madou - 3rd ed. - Boca Raton, FL : CRC Press, c2012 - 3 v. : ill. (some col.) ; 29 cm.
Includes bibliographical references and index
V. 1. Solid-state physics, fluidics, and analytical techniques in micro- and nanotechnology -- v. 2. Manufacturing techniques for microfabrication and nanotechnology -- v. 3. From MEMS to Bio-MEMS and Bio-Nems, Manufacturaing techniques and applications
9781420055115 (v.1) 1420055119 (v.1) 9781420055191 (v.2) 1420055194 (v.2) 9781420055160 (v.3) 142005516X (v.3)
Microelectromechanical systems
Nanoelectromechanical systems
Microfluidics