Fundamentals of microfabrication and nanotechnology / Marc J. Madou
Material type:
TextPublication details: Boca Raton, FL : CRC Press, c2012Edition: 3rd edDescription: 3 v. : ill. (some col.) ; 29 cmISBN: - 9781420055115 (v.1)
- 1420055119 (v.1)
- 9781420055191 (v.2)
- 1420055194 (v.2)
- 9781420055160 (v.3)
- 142005516X (v.3)
Contents:
V. 1. Solid-state physics, fluidics, and analytical techniques in micro- and nanotechnology -- v. 2. Manufacturing techniques for microfabrication and nanotechnology -- v. 3. From MEMS to Bio-MEMS and Bio-Nems, Manufacturaing techniques and applications
| Item type | Current library | Call number | Copy number | Status | Notes | Date due | Barcode | |
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UMPLIB GAMBANG | TK7875 .M33 2012 f (Browse shelf(Opens below)) | 1 | Available | 0000084211 | |||
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UMPLIB GAMBANG | TK7875 .M33 2012 f (Browse shelf(Opens below)) | 1 | Available | v.2 | 0000084212 | ||
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Open Shelf
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UMPLIB PEKAN | TK7875 .M33 2012 f (Browse shelf(Opens below)) | 1 | Available | v.3 | 0000084213 | ||
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Open Shelf
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UMPLIB PEKAN | TK7875 .M33 2012 f (Browse shelf(Opens below)) | 2 | Available | v.2 | 0000084136 |
Includes bibliographical references and index
V. 1. Solid-state physics, fluidics, and analytical techniques in micro- and nanotechnology -- v. 2. Manufacturing techniques for microfabrication and nanotechnology -- v. 3. From MEMS to Bio-MEMS and Bio-Nems, Manufacturaing techniques and applications