MARC details
| 000 -LEADER |
|---|
| fixed length control field |
01397nam a2200325 a 4500 |
| 001 - CONTROL NUMBER |
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| control field |
vtls000046986 |
| 003 - CONTROL NUMBER IDENTIFIER |
|---|
| control field |
KUKTEM |
| 005 - DATE AND TIME OF LATEST TRANSACTION |
|---|
| control field |
20251125095529.0 |
| 008 - FIXED-LENGTH DATA ELEMENTS--GENERAL INFORMATION |
|---|
| fixed length control field |
100705t2012 flua f 001 0 eng d |
| 020 ## - INTERNATIONAL STANDARD BOOK NUMBER |
|---|
| International Standard Book Number |
9781420055115 (v.1) |
| 020 ## - INTERNATIONAL STANDARD BOOK NUMBER |
|---|
| International Standard Book Number |
1420055119 (v.1) |
| 020 ## - INTERNATIONAL STANDARD BOOK NUMBER |
|---|
| International Standard Book Number |
9781420055191 (v.2) |
| 020 ## - INTERNATIONAL STANDARD BOOK NUMBER |
|---|
| International Standard Book Number |
1420055194 (v.2) |
| 020 ## - INTERNATIONAL STANDARD BOOK NUMBER |
|---|
| International Standard Book Number |
9781420055160 (v.3) |
| 020 ## - INTERNATIONAL STANDARD BOOK NUMBER |
|---|
| International Standard Book Number |
142005516X (v.3) |
| 039 #9 - LEVEL OF BIBLIOGRAPHIC CONTROL AND CODING DETAIL [OBSOLETE] |
|---|
| Level of rules in bibliographic description |
201412041503 |
| Level of effort used to assign nonsubject heading access points |
zairi |
| Level of effort used to assign subject headings |
201404221541 |
| Level of effort used to assign classification |
jamie |
| Level of effort used to assign subject headings |
201404221538 |
| Level of effort used to assign classification |
jamie |
| Level of effort used to assign subject headings |
201107132332 |
| Level of effort used to assign classification |
VLOAD |
| -- |
201007051656 |
| -- |
shikin |
| 040 ## - CATALOGING SOURCE |
|---|
| Original cataloging agency |
UMP |
| 090 ## - LOCALLY ASSIGNED LC-TYPE CALL NUMBER (OCLC); LOCAL CALL NUMBER (RLIN) |
|---|
| Classification number (OCLC) (R) ; Classification number, CALL (RLIN) (NR) |
TK7875 .M33 2012 f |
| 100 1# - MAIN ENTRY--PERSONAL NAME |
|---|
| Personal name |
Madou, Marc J. |
| 245 10 - TITLE STATEMENT |
|---|
| Title |
Fundamentals of microfabrication and nanotechnology / |
| Statement of responsibility, etc. |
Marc J. Madou |
| 250 ## - EDITION STATEMENT |
|---|
| Edition statement |
3rd ed. |
| 260 ## - PUBLICATION, DISTRIBUTION, ETC. |
|---|
| Place of publication, distribution, etc. |
Boca Raton, FL : |
| Name of publisher, distributor, etc. |
CRC Press, |
| Date of publication, distribution, etc. |
c2012 |
| 300 ## - PHYSICAL DESCRIPTION |
|---|
| Extent |
3 v. : |
| Other physical details |
ill. (some col.) ; |
| Dimensions |
29 cm. |
| 504 ## - BIBLIOGRAPHY, ETC. NOTE |
|---|
| Bibliography, etc. note |
Includes bibliographical references and index |
| 505 0# - FORMATTED CONTENTS NOTE |
|---|
| Formatted contents note |
V. 1. Solid-state physics, fluidics, and analytical techniques in micro- and nanotechnology -- v. 2. Manufacturing techniques for microfabrication and nanotechnology -- v. 3. From MEMS to Bio-MEMS and Bio-Nems, Manufacturaing techniques and applications |
| 650 #0 - SUBJECT ADDED ENTRY--TOPICAL TERM |
|---|
| Topical term or geographic name entry element |
Microelectromechanical systems |
| 650 #0 - SUBJECT ADDED ENTRY--TOPICAL TERM |
|---|
| Topical term or geographic name entry element |
Nanoelectromechanical systems |
| 650 #0 - SUBJECT ADDED ENTRY--TOPICAL TERM |
|---|
| Topical term or geographic name entry element |
Microfluidics |